Courses

ECE 877: Semiconductor Process Technology

Theory, design and fabrication of modern integrated circuits that consist of nano scale devices and materials. Topics include crystal growth and wafer preparation process including epitaxy, thin film deposition, oxidation, diffusion, ion implantation, lithography, dry etching, VLSI process integration, diagnostic assembly and packaging, yield and reliability.

Total Credit Hours: 3
Semester(s):
Spring 2020
Prerequisites:
ECE 473 or ECE 573
Instructor:
Baumgart, Helmut
Instructor Email:
HBAUMGAR@ODU.EDU

Weekly Live Sessions

Mon Tue Wed Thu Fri Sat
07:10 PM - 09:50 PM

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Questions? Contact the ODU CGEP Director:

Anothony W. Dean   •   Ph: 757-683-7121   •   adean@odu.edu